SPTS TECHNOLOGIES LIMITED patents filed

Company number: 07037852


Title Date Filed Status Publication number
Electrochemical deposition chamber 2013-03-18 Granted GB2512056
Shielding design for backside metal deposition 2005-10-28 Granted GB2419895
Methods and apparatus for sputtering 2005-10-17 Granted GB2419138
Methods and apparatus for controlling rotating magnetic fields 2005-04-13 Granted GB2413702
Methods and apparatus for processing wafers 2005-02-23 Granted GB2423633
Electromagnet arrangement for generating a uniform planar magnetic field 2004-12-08 Granted GB2409581
Substrate showerhead arrangement 2004-09-24 Granted GB2418381
Depositing piezoelectric films for resonators 2004-04-02 Granted GB2400490
RF stand offs 2004-03-26 Granted GB2412485
Electrostatic clamping of thin wafers in plasma processing vacuum chambers 2004-01-07 Granted GB2398166
Deposition methods and apparatus 2003-06-23 Granted GB2390378
Shutter 2003-05-01 Granted GB2390376
Plasma processing apparatus 2003-04-22 Granted GB2387964
Forming tungsten or tungsten containing films using krypton or xenon as sputter gas; Tungsten/tungsten nitride stacks 2003-03-11 Granted GB2399350
Plasma processing apparatus 2003-02-04 Granted GB2411904
Plasma processing apparatus 2003-02-04 Granted GB2401375
Depositing a tantalum film 2002-07-15 Granted GB2393189
Method of depositing aluminium nitride 2002-06-20 Granted GB2392676
Methods and apparatus for forming precursors 2002-04-04 Granted GB2390379
A method of etching a substrate 2002-03-27 Granted GB2374728
Methods of sputtering using Krypton 2001-12-21 Granted GB2375117
Electrostatic clamping 2001-12-04 Granted GB2375432
Magnetron sputtering apparatus 2001-12-04 Granted GB2386128
Magnetron sputtering 2001-07-18 Granted GB2377228
Method of cooling an induction coil 2000-04-19 Granted GB2361587
Depositing dielectric 2000-04-14 Granted GB2361244
Sputtering apparatus 1999-12-24 Granted GB2346155
Forming barrier layers in semiconductor devices 1999-11-04 Granted GB2357371
Deposition apparatus 1999-05-11 Granted GB2350374
Depositing a layer 1999-04-20 Granted GB2349392
Gas delivery system 1999-03-08 Granted GB2347686
Inductive coil assembly 1998-12-17 Granted GB2387023
Sputtering 1998-10-23 Granted GB2342927
Apparatus for processing workpieces 1998-06-25 Granted GB2341489
Electrostatic chucks 1998-06-02 Granted GB2340659
Methods of forming a barrier layer based on titanium nitride 1997-11-20 Granted GB2319533
Platen for semiconductor workpieces 1997-09-18 Granted GB2329515
Temperature sensing methods and apparatus 1996-04-23 Granted GB2300256





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